dissociative electron attachment spectroscopy

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Photoresist — A photoresist is a light sensitive material used in several industrial processes, such as photolithography and photoengraving to form a patterned coating on a surface. Contents 1 Photoresist categories 1.1 Tone 1.2 Developing light wavelength … Wikipedia
Extreme ultraviolet — Extreme Ultra Violet radiation (EUV) is generally considered to be the part of the electromagnetic spectrum spanning from 120 nm down to 10 nm. Its main uses are photoelectron spectroscopy, solar imaging, and lithography. EUV is naturally… … Wikipedia
radiation — radiational, adj. /ray dee ay sheuhn/, n. 1. Physics. a. the process in which energy is emitted as particles or waves. b. the complete process in which energy is emitted by one body, transmitted through an intervening medium or space, and… … Universalium

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